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Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and ex
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Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and ex
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MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials
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Micro Electro Mechanical System Design
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It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) d